Miniature Triaxial K-Beam MEMS Capacitive Accelerometer Family

Kistler North America's Type8395A is designed to simultaneously measure acceleration and low-frequencyvibration in three mutually perpendicular axes (x, y and z) within a variety ofautomotive, aerospace, OEM, R&D and general laboratory test applications.

The Kistler Type 8395A series isavailable in six different models, with measurement ranges from A plus or minus 2 to A plus or minus 200 gand a frequency response of 0 to 1000 Hz (5 percent). The compact designprovides a 0.85-inch (21.6 mm) cube footprint and incorporates a MEMS variablecapacitance sensing element, consisting of a small inertial mass and flexureelement sandwiched between two parallel plates. As the mass deflects underacceleration, the capacitance between the element and plates changes, which isconverted to a proportional voltage by the internal analog signal conditioner. The output signal format of the Type8395A series is bipolar at 0A plus or minus 4V and provides a high-sensitivity, low-noisesignal, which is compatible with a wide variety of data acquisition or readoutdevices. The accelerometer is shock rated to 6,000 g pk. Sensing elements and integral electronics are housed withina lightweight, welded titanium housing with a specially designed miniaturecircular 9-pin connector for a fully hermetic design.

The Kistler Type 8395A triaxial capacitive MEMSaccelerometer series offers thermal stability andreliable performance over an operating temperature range of -65 to 250F (-55 to+125C). It is powered by a single wide range supply between +6 and +50V dc and has an internal voltageregulator. In the event that external temperature compensation is desired, atemperature output is provided, in addition to the output signals. Groundisolation is obtained by mounting the sensor using one of the off-ground accessories or by adhesively mountingthe sensor to the test object using the sideof the sensor with the integral hard anodizedplate.

Miniature Triaxial K-Beam MEMS Capacitive Accelerometer Family