Nano Positioning Stage

Aerotech's latest addition to its nano Motion Technology series offers nanometer-level precision, the ability to make repeatable 5-nm steps and a dual-axis mechanical configuration that provides an exceptionally long length of travel. The ANT130-XY offers 1-nm mechanical resolution, 50-nm repeatability and 250-nm accuracy while providing convenient, useful travel lengths from 60 to 160 mm in both X and Y directions.

Competitive systems providing this level of accuracy and length of travel require a combination of piezo stages for fine positioning and ball screw/linear motor stages for long travel and load/unload processes. Flexure-based piezo stages can achieve nanometer precision but are typically limited to less than 1-mm travel. Other linear motor-based stages and prior technologies have precision limitations of a few nanometers.

The ANT130-XY is a three-piece design incorporating a crossed-roller bearing, linear motor and dual-axis stage. The design allows critical elements such as orthogonality, straightness and flatness to be optimized and results in exceptional geometrical tolerances. The stage offers advantages for high-precision nanotechnology positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

A key is noncontact direct-drive technology that offers the robust, accurate and high-speed positioning necessary for the mass production of precision devices. The system's unique drive-and-bearing combination, packaged in an extremely small profile and footprint, targets applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion. For more information, go tohttp://designnews.hotims.com/27742-539.