Aerotech ABS2000 Air-Bearing Spindles

Addressing semiconductor applications that include precision wafer processing and inspection, the ABS2000 high speed air-bearing spindles have low inherent inertia and high torque output, making them capable of extremely high speeds and accelerations. Balanced to ISO 1940 G 0.4 tolerances, the unit's labyrinth-type sealing minimizes particle migration from the spindle, resulting in certification for Class 1 clean-room operation. Without cooling fins or external cooling, the motor produces more than 0.25 N-m (38 oz-in) of continuous torque. By directly coupling the motor and rotary encoder to a common shaft, the unit achieves a velocity ripple of less than 0.1 percent, an asynchronous error motion of less than 20 nm, and total error motion of less than 100 nm. Spindle resolution can be as high as 0.05 arc sec, when coupled to Aerotech's A3200 controller and Npaq drive rack. For more information on Aerotech ABS2000 Air-Bearing Spindles, go to http://rbi.ims.ca/4925-508.