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Vapor deposition

August 3, 1998

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Comprehensive Downstream Effluent Management technical paper on chemical vapor deposition is targeted at people working on vacuum process systems that have effluent by-products that can solidify. The paper covers various techniques to handle by-product in a number of vacuum process systems.

MKS Instruments, (F) Vacuum Products Group, 5330 Sterling Dr., Boulder, CO 80301, FAX (303) 442-6880.

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