Smooth, Clean Motion

Motion in extremely clean environments, such as semiconductor wafer processing, is always a tricky proposition. The tradeoff for excellent sealing typically results in higher friction. A new air cylinder design from Airpot promises both low contamination and wear, and is even guaranteed to outlast the machine in which it is installed. Using a design approach called Force Without Friction technology, the company claims friction reduction by three orders of magnitude over its previous air cylinder design.

Called the Airpel-AB, AB for air bearing, the design employs a specially shaped stainless steel piston precisely fitted to a borosilicate glass cylinder that creates an air-bearing effect around the piston. With 5 psi or more of pressure applied to the cylinder, the same air used to provide the actuation force also produces an air cushion providing radial support for the piston and preventing its contact with the cylinder wall. Movement of the ultra-low friction ball joints that connect the rod results in minimal force reduction.

The single-acting unit extends with applied air and does not have a return spring, so an external reset force must be applied. While no lubrication is required, the air supply for the pneumatic driver must be dry, filtered (1 micron or less) air from a coalescing filter.

With pressures as low as 5 psi, the air-powered motion devices drive or support forces from 2g to 58 kg over a temperature range of -20 to 90C. In addition to applications in semiconductor and other clean rooms, the cylinders target positioning mechanisms supporting delicate materials, optics or liquids and sensitive force control for holding or clamping fragile materials.

CONTACT: Application Engineer, AirpotTel: 1-800-848-7681; e-mail: [email protected]

Get more information on the Airpot Airpel-AB air cylinder.

Scroll Down to view a diagram of the cylinder.