What breakthroughs drove the cost reduction .... e.g. proof of concepts that showed market potential, therefore investment in process? What process changes occured ... evolutionary from semiconductor knowledge or revolutionary in chemistry, lithography etc?? Are the fab houses investing millions, billions in retooling ... etc
I saw slide 8 ...
Conceptually I would be thinking along the lines of 'backfilling' voids with an etchable or particle sensitive material that can be removed after cut and bond. Sort of like making concrete pillars and filling the voids with plaster and etching out the plaster on completion, but with deposition or thermal (or laser?) process, -- chemical (e.g. etching) probably not an option at the back-end processing after wafer cut??? (No I never smoked pot at Berkeley, never even been to Berkeley <wink>)
Interesting presentation and great topic ...
Thanks for archiving these sessions, this is one I wish I were able to attend live ...
I don't think that we have specific plans to incorporate MEMS sensors into the process in the immediate future, but we are exploring options for a major overhaul of our current process.
How would height detection work when barometric pressure varies with time? Would there not have to be a reference to ground and communication with the ground sensor?
Thank you for a great introduction. Very interesting topic even I am in manufacturing of MEMS, but the application is much wider then I have heard before.
Like to understand more on the reliability testing on MEMS and reliability criteira. Unlike silicon devices, MEMS is a electro mechanical structure, many reliability is related to the mechancial strength degradation rather than a electrical parametric shift. How and what standard MEMS reliability we have today ? What organization is helping to define this standard ?
Thanks Alissa. What about packaging? It seems that this is almost as hard as making the device? Orientation, testing, metrology all seem really hard at such a small scale
There are lots of non-silicon process technologies used in MEMS, such as: ultrasonic drilling, laser drilling, electroplating, molding. Some people are exploring how to inkjet MEMS and ICs, as well.
Lots of questions about standards - yes, there are a lot of people trying to figure out how best to create and implement standards. It's a tricky question. You'll see in my slides Tue-Thur about how many different ways there are to make even just one device, like a gyroscope. The problem with MEMS is that you need to have vertical features, and to get a certain vertical feature, you need a specific process step. So the design dictates the process and vice versa. I think the most likely scenario is that we will standardize process modules, or process steps. Think standardized Lego blocks that can be put in any order to create a given device.
Later this week, I'll be discussing all kinds of MEMS sencors and actuators.
Someone asked about reliability - MEMS are very reliable devices - once they've been properly developed and tested, of course. Silicon is as strong as steel, and doesn't have a fatigue process like metals do *(there have been some rare exceptions observed, but it's generally not a problem for commercial devices)
There are many MEMS foundries that specialize in custom MEMS development: Micralyne, Silex Microsystems, IMT, DALSA, Tronics, Asia Pacific, MEMSCAP, even TSMC
See (hear) you tomorrow Alissa. BTW, we'd still like to have your photo next to your name here on our forum. All your predecessors posted theirs as well.
still got problems with audio, maybe you can arrnage pre system test. Checked both my machines since logging in to webinar desktop will not play any audio now, laptop ok but still could not get lesson audio,
Can you tell us more about efforts to expand production beyond the customized devices MEMS are today? In other words, how can they be produced in higher volumes?
Thanks, Alissa, for the great presentation! If I have a custom MEMS design, are there foundries that I can take my design to get them fabricated and packaged?
You mentioned that the production of MEMS is basically locked up by a number of big players in the industry, but there is still a lot of room for innovation and small ventures to participate. Please elaborate on these opportunities.
Dr. Fitzgerald: You mentioned 40 or so MEMS in Audis and BMWs, especially in airbags and tire pressure sensing. Other than those two, and in electronic stability control, which automotive systems are using those 40 MEMS?
UWARENESS: Read something about it 10 years ago about MIT war bugs research, lately I read a paper about this flying insect development. NOT MUCH use beyong the iPhone compass
Interested in automotive & consumer applications, I am not HW engineer, but business development engineer, so interested in learning about new technology.
ANSWER: WERE YOU AWARE OF HOW ADVANCED MEMS DEVICES HAVE BECOME? (Or were you like me and thought they were still mainly used as accelerometers for auto airbag deployment?)
Use MEMS to sense the magnetic filed displacements and measure the accelorator in G then convert into other parameters through PWM to innitiate motions
Is there a lot of development being done combining sensors and mechanical systems such as the "bug scenario with a flying insect and a micro-camera" I pictured earlier?
ANSWER (if you haven't): WHAT END-USER AREAS ARE YOU INTERESTED IN, IN TERMS OF MEMS SENSOR APPLICABILITY? Consumer, medical, industrial? What projects/devices specifically?
quoting alex: " Note however that some companies block live audio streams. If when the show starts you don't hear any audio, try refreshing your browser"
INVASION OF PRIVACY: This is so cool that it get scary. I'm afraid of the breach of privacy that awaits us: flying buggs with mounted microcamera spying our enymies and also letting others spy on us.
Ran - Might go to the View tab of your Power Point software and click on Norma. This should provide your with the slide, plus a thumbnail view on the left [with number]
I'm primarily software (mostly mobile, embedded, drivers, etc) - hardware is various equipment repairs (PC and Xbox 360s) - little design-level knowledge, and know almost nothing about MEMS
Hardware engineering, systems engineering and testing. Former Naval Test and Evaluation Officer for the US Navy's ARLEIGH BURKE destroyer program. Navy taught me project management. PMP. History major, minor in GenEng.
"audio widget shows up just about 2pm EST" - so no advance testing to make sure it works? hmm...I usta be in the webconferencing biz and we always got the test features up at least 15 min ahead...
The streaming audio player will appear on this web page when the show starts at 2pm eastern today. Note however that some companies block live audio streams. If when the show starts you don't hear any audio, try refreshing your browser.
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