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Alissa M. Fitzgerald
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Re: Part IV: MEMS in Consumer Electronics II - Taxonomy of Microphones, Pressure Sensors & More
Alissa M. Fitzgerald   4/26/2012 2:50:24 PM
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@luizcosta: to start a garage size MEMS factory to build simple MEMS, if you bought used equipment and had some really great maintenance guys would cost ~ $5M.  That's just to build it.  Then plan on several million a year for power, water, specialty gases and consumables. Building a MEMS factory that could do gyros, etc. would cost about $50M.  But you don't need to build a MEMS garage...many universities allow external companies to rent time in their clean room.  Check out schools in the "NNIN" - a nanofabrication network - like Stanford, Cornell, Georgia Tech, UCSB. Save your money for something else!



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