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Alissa M. Fitzgerald
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Re: Part III: MEMS in Consumer Electronics I - Taxonomy of Motion Sensors
Alissa M. Fitzgerald   4/25/2012 2:47:21 PM
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@eviscito, who asked about MEMS integration in ASICs - it can be done, but it depends on the MEMS architecture.  Some MEMS can not be easily integrated with a CMOS process.  Analog Devices has very successfully come up with a MEMS design that is integrated with their BiCMOS electronics.  Ultimately, it's a cost and yield question.  Most mfgrs. choose to process MEMS and CMOS wafers separately and then integrate at the package level, because it's cheaper!



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