The Airglide LED Wafer
System from Dover
is now available in a wide base version for additional stiffness and support
for larger payloads up to 50kg, over travels up to 1 m. The Airglide
system is a maintenance-free positioning solution for stepping or scanning
applications, and for laser processing of LED or semiconductor wafers. Other
applications include metrology or precision imaging systems which require high
accuracy step positioning moves.
The Airglide system has straightness to ±0.5 µm, compensated
accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending
upon the payload, it can accelerate at 5 m/s2, provide maximum velocity of 1000 mm/s and deliver
continuous force of 76 N and peak force of 240 N over available travel ranges
from 100 to 1,000mm. The system can be operated with servo drive control
hardware, or packaged with a Dover control solution.
Available options include motion rotary and z-theta
products, granite base, and granite bridge, which can be integrated with the
Airglide XY. When configured in a vertical orientation for use as a Z
axis, a pneumatic counterbalance system can be provided. Customized
pneumatic tubing and signal cabling is also available for customer-enabling
technology or additional axes.
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