A growing number of
OEMs are opting to incorporate MEMS-based pressure sensing components into
portable device and equipment designs. As a device designer, it's important to
recognize that the choice of pressure sensing type within these applications
tends to be highly specific to the intended operating characteristics of both
the sensor and device itself.
For example, a handheld,
battery-operated spirometry device must be able to be turned on and off quickly
while continuously recording data over a 20-second period with optimized use of
available power. Based on these requirements, it requires a low-voltage
pressure sensor which is able to use power only as needed. In another instance, pressure sensors for handheld HVAC
monitors, due to their portability and manner of use, cannot be overly
susceptible to vibration or position changes, which could ultimately affect
measurement integrity.

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Among the various
types of sensing technologies available for these types of applications, low-voltage
die-based MEMS pressure sensors offer some of the greatest advantages within
portable devices, including high-reliability performance and extended useful
service life. This is particularly important for environments characterized by
a wide dynamic temperature range, or where external shock and vibration is
present. In addition, these sensors can be isolated from internal device
electronics, offering added protection from signal degradation as a result of
thermal transfer.
Low-voltage MEMS
pressure sensor components are comparatively lower in cost and offer
high-quality mass customization and production capabilities. When integrated
into assembled portable devices and equipment, they can help achieve
exceptional measurement linearity and repeatability, with minimized power
consumption and extended service life.
Performance Characteristics
When selecting an
appropriate pressure sensor for integration into a portable device, you should
understand a sensor's own unique performance characteristics as they relate to
device operation requirements, as well as the unique operating conditions of
the intended device usage environment and collective potential effects on
device performance. Following is an overview of these considerations from a
device design perspective:
Sensor Die Design - A typical MEMS pressure
sensor is constructed of a body, or "die," and a thin silicon diaphragm with
four surface piezoresisÂtors, whose resistance changes in response to mechanical
stress. They are generally arranged in a bridge configuration and are precisely
located on the diaphragm surface to maximize deflection response. In doing so, pressure
differential response is maximized across the diaphragm. MEMS pressure sensor quality and performance within an application
environment is most directly tied to sensor die quality.
Package
Size - By definition,
a portable device is characterized by its ability to be easily transportable
and with on-demand functionality. This typically calls for compact pressure sensor
designs which offer performance stability, low voltage requirements, and which can
reliably operate in a lightweight, easily transported package. Thus, when
incorporating pressure sensing technologies into portable device designs,
compactness is a near-absolute requirement. The space constraints within the
devices themselves impose certain limitations on sensing technology options
within these types of applications. Sensors must not only operate within a
small package, they must also be isolated from the internal device electronics to
avoid signal degradation.
While traditional low-pressure
ceramics products are still in use to satisfy these requirements within some
smaller device applications, they are design prohibitive for portable devices,
as size and weight remain major considerations. Equally important is for the
sensor to be compact enough that it will not cause stress on the sensor package
within the assembled device, as this affects overall output signal accuracy,
ultimately effecting overall device performance.
Temperature Variation - Operating temperature variations can also have a direct affect
on MEMS pressure sensor offset voltage and output span, and can ultimately
affect overall measurement stability. Portable device applications typically require
use of a pressure sensor that can reliably operate in moderate temperature excursions
of 0 to 50C, though certain operating conditions can require more extensive
ranges. Portable oxygen concentrators are an example of a device featuring
integrated pressure sensors that are used in relatively moderate temperatures,
though some models may require a sensor with wider, industrial-level
temperature ranges of -20 to 85C. To meet these varying range requirements,
manufacturers frequently look for a pressure sensing technology with either
user-adjustable or integral temperature compensation options.
MEMS-based pressure sensing component
technologies are commonly offered with customer-applied temperature compensation
capability, which allows manufacturers to tailor temperature performance to
their own device performance requirements.
Sensor Output and Device
Stability - Sensor output sensitivity is
another parameter that will impact signal strength at a particular operating
voltage. Higher sensitivity devices can typically be operated at lower voltages
with less signal degradation. The higher output level of the pressure sensing die
used offsets the lower operating voltage, thus maintaining comparable signal-to-noise
ratios to those found in previous generation devices.
Power/Voltage
Supply Requirements and Warm-up Shift - As most portable devices are battery operated, pressure sensor power
and voltage supply requirements have traditionally been 5V, though the general
trend has been a move toward 3.3V or lower voltages, to help further preserve
product battery life. These lower power requirements facilitate easier customer
integration of sensors into finished product designs, with increased
measurement stability and performance. This is because the risk of internal
self-heating and related offset shifts are reduced.
When considering
temperature requirements, warm-up shift is also a concern. The warm-up shift of a device is the effect that power has on device
physical characteristics in its warm-up phase. An alternate and preferred approach to
reducing supply voltage modulates the sensor supply as required by the system
bandwidth. In other words, apply power to the sensor only when needed. This
reduces power to the sensor to the time average (duty-cycle) apÂplied and, therefore,
reduces warm-up drift.
To help manage power
requirements, pressure sensors are offered in both compensated and
uncompensated versions. Compensated devices offer lower calibration costs,
faster production cycles, lower production equipment overhead and easier
design-in capabilities. Uncompensated versions are generally designed to
operate at 5V.
Low-voltage pressure sensors
offer 1.8 and 3.3V power supply requirements, to facilitate sensor integration
into portable device and equipment designs.
Low-Power Sensing Applications
With the design
parameter issues listed above in mind, the following examples help illustrate
the successful incorporation of low-voltage MEMS pressure sensors:
HVAC pressure transmitter for
building monitoring. A portable
industrial airflow measurement device is used for on-demand measurements of low
airflow beneath HVAC vents within typical office environments or apartment
building setups. Typically, this application requires use of a basic pressure
sensor with unconditioned, uncompensated millivolt output signal, and provides
a raw output signal for the OEM device. Within the intended pressure sensor
usage environment, the selected component must offer long-term reliability and
stability, as well as relatively good accuracy and low environmental media
sensitivity. The device application environment itself is typically
characterized by modest temperature variations and humidity. In these types of applications,
the requirement for low warm-up shift is also important, as the device needs to
operate with stability soon after powered on. Position sensitivity is less
important, as the device itself is specifically orientated under duct work. The
signal-to-noise ratio (or noise floor) of these sensors must be very low, as
very small air pressures are being measured. Low power consumption, due to
battery or current loop operation, is also a significant consideration.
Medical breathing apparatus. An example of an application
requiring a higher degree of accuracy and performance can be found in medical
breathing apparatus used within critical patient care applications. Device
designs must be highly rugged, as well as offer high accuracy and reliability
within demanding environments. As medical breathing devices are employed within
hospital, urgent care and other clinical settings, they can be subjected to ongoing
high levels of shock, vibration and g-force pressures, as well as wide output ranges.
The demands placed upon devices within their intended usage environment would require OEMs to specify a millivolt output or amplified pressure sensor,
fully calibrated and temperature compensated. Low position and shock
sensitivity are also requirements.
Also required for this type of
device is the integral amplification of the pressure sensor. The amplified
pressure sensor component typically houses an onboard ASIC (built-in amplifier
with compensation), allowing control of the millivolt output sensor gain, noise
and compensation. Amplified devices are scaled to fall into the input range of
a common analog-to-digital microprocessor without additional gain. The
amplified pressure sensor can be thought of as an accurate, compensated device
with an amplified output signal that is more plug-and-play for the OEM. This is
typically required when the customer's analog-to-digital converter does not have
a built-in gain feature.
This type of application typically
uses a compensated millivolt pressure sensor. Compensated millivolt low-voltage
pressure sensors are calibrated to both zero and span and are temperature
compensated, to ensure accurate output signal over a specified operating temperature
range. A compensated device is typically used in an application were accuracy
is a priority and the OEM relies on the pressure sensor manufacturer to provide
all temperature compensation and calibration within the pressure sensor itself.
In this case, a manufacturer typically requires a clean, low-noise output
signal. The OEM would typically provide an amplifier or ASIC somewhere on their
PCB to increase the mV output signal.
Tim Shotter is director of new products
and Dan DeFalco is marketing manager at All
Sensors Corp.