|
Specification
|
Z (vertical) axis
|
r(rotational) axis
|
| 1. Range of motion |
6 mm, variable, both at top of stroke (receive) and bottom of stroke (place) |
180-degree, fixed |
| 2. Accuracy |
±2 µm vertical |
±2 µm horizontal (X-Y) or 0.2 mrad=0.011-degree ±4 µm vertical at edge of 10 mm part or 0.16 mrad=0.01-degree |
| 3. Move time |
20 msec, 2 mm (typical) move |
75 msec, full stroke |
| 4. Motor mass |
Motor is stationary, So mass is not a constraint |
Motor moves with Z, thus minimum mass required |
| 5. Motor volume |
Mechanism must be compact |
Mechanism must be compact. Horizontal offset between flipper payload and Z-bearings contribute to "Abbe" Error (errors caused by Z-bearing). |
| 6. Crash protection/detection |
If the part contacts the tray during placement, the axis shall not lose position |
If the part contacts the tray during placement, the axis shall not lose position |
| 7. Motion profile |
Trapezoid |
Soft start/stop to allow speed without shifting part |
| 8. Static torque |
Leadscrew drive multiplies the torque available from the motor |
The direct drive and the lever arm of the flipper (19-mm) require high static hold torque |