A new low profile rotary stage leverages Piezo Ceramic Linear Motor (PCLM) technology for use in handling 300-mm silicon wafers for semiconductor processing. With a profile height of only 32 mm, the PLR-300 allows for a minimal working stack-up height when used with other stages--such as mounted atop and straddling a linear stage. This is very beneficial for minimizing causes of abbe error. Powered by two diagonally opposed PCLMs, the PLR-300 is said to provide superior drive balance and intrinsic smoothness. The PCLM also does not generate heat during operation. The stage is non-magnetic as well and compatible with clean room standards. Angular resolution is ±0.0005 degrees with a positioning accuracy of ±2 microns. Anorad, Product Code 4215.
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