As the world awaits commercialization of 0.18 micron- technology wafers, a University of Texas (Austin, TX) team led by Grant Willson printed 0.08 micron features on a semiconductor wafer using a 193-nm-wavelength stepper. The Semiconductor Industry Association's roadmap for the market did not expect 0.08 micron features until the year 2009. Experts predicted the development of a new post-optical technology to produce sizes at or below 0.10 micron. However, Willson generated the minute features using an etched-quartz phase-shift photomask produced by DuPont Photomasks Inc. (Round Rock, TX). "I didn't believe it could be done at first," says Willson. "It really works better than my wildest imaginings, and it appears that the process latitude is there to generate smaller features yet." Call (512) 471-7272.
One way to keep a Formula One racing team moving at breakneck speed in the pit and at the test facility is to bring CAD drawings of the racing vehicleís parts down to the test facility and even out to the track.
Most of us would just as soon step on a cockroach rather than study it, but thatís just what researchers at UC Berkeley did in the pursuit of building small, nimble robots suitable for disaster-recovery and search-and-rescue missions.
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